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Passivation effect of (NH4)(2)S-x treatment on GaAs surface before photo-resist and O-2 processes

Title
Passivation effect of (NH4)(2)S-x treatment on GaAs surface before photo-resist and O-2 processes
Authors
Suh, KSLee, JLPark, HHKim, CHLee, JJNam, KS
POSTECH Authors
Lee, JL
Date Issued
Jan-1996
Publisher
ELSEVIER SCIENCE SA
Keywords
X-ray photoelectron spectroscopy; thermal stability; passivation effects; gallium arsenide; HYDROGEN
URI
http://oasis.postech.ac.kr/handle/2014.oak/21580
ISSN
0921-5107
Article Type
Article
Citation
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, vol. 37, no. 1-3, page. 172 - 176, 1996-01
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 LEE, JONG LAM
Dept of Materials Science & Enginrg
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