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The crossover of preferred orientation in TiN film growth: A real time x-ray scattering study

Title
The crossover of preferred orientation in TiN film growth: A real time x-ray scattering study
Authors
Je, JHNoh, DYKim, HKLiang, KS
POSTECH Authors
Je, JH
Date Issued
Jan-1997
Publisher
MATERIALS RESEARCH SOCIETY
URI
http://oasis.postech.ac.kr/handle/2014.oak/21400
ISSN
0884-2914
Article Type
Article
Citation
JOURNAL OF MATERIALS RESEARCH, vol. 12, no. 1, page. 9 - 12, 1997-01
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 JE, JUNG HO
Dept of Materials Science & Enginrg
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