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후면조사형 CMOS Image Sensor의 광특성 개선 연구

Title
후면조사형 CMOS Image Sensor의 광특성 개선 연구
Authors
이원준
Date Issued
2014
Publisher
포항공과대학교
Abstract
We designed and optimized gapless microlens for backside illuminated (BSI) CMOS image sensors (CIS) to improve optical properties. Gapless microlens can provide better light focusing on photo-diode than conventional microlens. We used three-dimensional (3D) finite-difference time-domain (FDTD) simulation to optimize the radius of curvature of gapless microlens and over-coat layer thickness. We also designed light guiding structures to reduce spatial crosstalk and increase optical efficiency. By using total internal reflection and isolated pixels, we could guide the light into over-coat layers and color filters. Using the theory of frequency selective surface (FSS), we designed UV pass filters for optical black pixels. The UV pass filter makes it possible to perform photo-diode curing process, so it can reduce dark current noise. Our works are expected to make a significant contribution to the developments of sub-micron CIS pixels.
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001674390
http://oasis.postech.ac.kr/handle/2014.oak/2100
Article Type
Thesis
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