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Impedance model of helical resonator discharge

Title
Impedance model of helical resonator discharge
Authors
Park, JCKang, B
POSTECH Authors
Kang, B
Date Issued
Jan-1997
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGI
Keywords
helical resonator; high density plasma science; impedance model; RF discharge; PLASMA SOURCE; FREQUENCY
URI
http://oasis.postech.ac.kr/handle/2014.oak/20895
ISSN
0093-3813
Article Type
Article
Citation
IEEE TRANSACTIONS ON PLASMA SCIENCE, vol. 25, no. 6, page. 1398 - 1405, 1997-01
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 KANG, BONG KOO
Dept of Electrical Enginrg
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