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Amorphous, silicide, and crystalline Fe films grown on Si(001) by radio-frequency magnetron sputtering

Title
Amorphous, silicide, and crystalline Fe films grown on Si(001) by radio-frequency magnetron sputtering
Authors
Je, JHKim, HKNoh, DY
POSTECH Authors
Je, JH
Date Issued
Jan-1999
Publisher
MATERIALS RESEARCH SOCIETY
Keywords
X-RAY-SCATTERING; PREFERRED ORIENTATION; EPITAXIAL-GROWTH; THIN-FILMS; BETA-FESI2; HETEROEPITAXY; ENERGY; SI(100); (111)SI
URI
http://oasis.postech.ac.kr/handle/2014.oak/20281
ISSN
0884-2914
Article Type
Article
Citation
JOURNAL OF MATERIALS RESEARCH, vol. 14, no. 4, page. 1658 - 1663, 1999-01
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 JE, JUNG HO
Dept of Materials Science & Enginrg
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