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Bombarding energy dependence of bonding structure in amorphous carbon interlayer and its effect on diamond nucleation

Title
Bombarding energy dependence of bonding structure in amorphous carbon interlayer and its effect on diamond nucleation
Authors
Oh, UCCheng, DGLu, FXJe, JH
POSTECH Authors
Je, JH
Date Issued
Jan-1999
Publisher
MATERIALS RESEARCH SOCIETY
Keywords
CHEMICAL-VAPOR-DEPOSITION; MICROWAVE PLASMA NUCLEATION; ION-BEAM; PRETREATMENT PROCESS; ENHANCED NUCLEATION; LOW-PRESSURE; FILMS; GROWTH; SILICON; SURFACES
URI
http://oasis.postech.ac.kr/handle/2014.oak/20280
ISSN
0884-2914
Article Type
Article
Citation
JOURNAL OF MATERIALS RESEARCH, vol. 14, no. 5, page. 2029 - 2035, 1999-01
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 JE, JUNG HO
Dept of Materials Science & Enginrg
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