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Thermal stability of RuO2, BaxSr1-xTiO3/RuO2, and BaxSr1-xTiO3/Pt/Ti/SiO2 on Si(100)

Title
Thermal stability of RuO2, BaxSr1-xTiO3/RuO2, and BaxSr1-xTiO3/Pt/Ti/SiO2 on Si(100)
Authors
Kang, TSKim, YSJe, JH
POSTECH Authors
Je, JH
Date Issued
Jan-2000
Publisher
MATERIALS RESEARCH SOCIETY
Keywords
THIN-FILMS; DIELECTRIC-PROPERTIES; BASE ELECTRODES; CONSTANT; SILICON; OXIDE; (BA
URI
http://oasis.postech.ac.kr/handle/2014.oak/19874
ISSN
0884-2914
Article Type
Article
Citation
JOURNAL OF MATERIALS RESEARCH, vol. 15, no. 9, page. 1955 - 1961, 2000-01
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 JE, JUNG HO
Dept of Materials Science & Enginrg
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