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Growth behavior and defects in conductive SrRuO3 thin films grown on a Si(100) substrate by sputtering

Title
Growth behavior and defects in conductive SrRuO3 thin films grown on a Si(100) substrate by sputtering
Authors
Oh, SHPark, CG
POSTECH Authors
Park, CG
Date Issued
Jan-2001
Publisher
MATERIALS RESEARCH SOCIETY
Keywords
ELECTRICAL-PROPERTIES; THERMODYNAMIC STABILITY; BOTTOM ELECTRODES; SI; OXIDES; CAPACITORS
URI
http://oasis.postech.ac.kr/handle/2014.oak/19494
ISSN
0884-2914
Article Type
Article
Citation
JOURNAL OF MATERIALS RESEARCH, vol. 16, no. 7, page. 1998 - 2006, 2001-01
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 PARK, CHAN GYUNG
Dept of Materials Science & Enginrg
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