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A scanning photoelectron microscope for materials science spectromicroscopy at the Pohang Light Source

Title
A scanning photoelectron microscope for materials science spectromicroscopy at the Pohang Light Source
Authors
Shin, HJLee, MKKim, GBHong, CKLee, JYKim, JWPark, SMRoh, YSJeong, K홍정기
Date Issued
Jan-2003
Publisher
E D P SCIENCES
Abstract
A Fresnel zone plate based SPEM (scanning photoelectron microscope) is in operation at the Pohang Light Source. Space resolution of the SPEM is typically less than or similar to 1 mum (0.4 mum in the best resolution) and the photon flux at the focused spot is similar to10(9) photons/s. The SPEM is working in the energy range between 400 and 1,000 eV. In taking images and spectra, the SPEM detects photoelectrons from the focused spot using a hemispherical analyzer with 16-channel detection capability at energy resolution of similar to 0.5 eV The SPEM also measures sample current, with which comparative x-ray absorption micro-spectroscopy is available in limited energy range with spectral resolving power (E/DeltaE) of similar to 3,000. The advantage of detecting sample current image and x-ray absorption spectrum at the Fe L-III-edge is demonstrated for understanding the effect of electrochemically deposited Zn layer on Fe substrate.
Keywords
BEAMLINE
URI
http://oasis.postech.ac.kr/handle/2014.oak/18512
DOI
10.1051/JP4:20030003
ISSN
1155-4339
Article Type
PROCEEDINGS PAPER
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