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Role of amorphous Si3N4 in the microhardness of Ti-Al-Si-N nanocomposite films

Title
Role of amorphous Si3N4 in the microhardness of Ti-Al-Si-N nanocomposite films
Authors
Park, IWKim, KHSuh, JHPark, CG
POSTECH Authors
Park, CG
Date Issued
Jan-2003
Publisher
KOREAN PHYSICAL SOC
Keywords
Ti-Al-Si-N; superhardness; nanocomposite; percolation phenomenon; amorphous Si3N4; CHEMICAL-VAPOR-DEPOSITION; MECHANICAL-PROPERTIES; COATINGS; MICROSTRUCTURE; BEHAVIOR
URI
http://oasis.postech.ac.kr/handle/2014.oak/18499
ISSN
0374-4884
Article Type
Article
Citation
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, vol. 42, no. 6, page. 783 - 786, 2003-01
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 PARK, CHAN GYUNG
Dept of Materials Science & Enginrg
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