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Spectroscopic ellipsometric study of ZnO and Zn1-xMgxO thin films grown on (0001) sapphire substrate

Title
Spectroscopic ellipsometric study of ZnO and Zn1-xMgxO thin films grown on (0001) sapphire substrate
Authors
Kang, TDLee, HPark, WIYi, GC
POSTECH Authors
Yi, GC
Date Issued
Jan-2004
Publisher
KOREAN PHYSICAL SOC
Abstract
We grew ZnO and Zn1-xMgxO thin films on (0001) sapphire substrates by using metal-organic vapor phase epitaxy and measured the pseudo-dielectric functions using variable-angle spectroscopic ellipsometry. We analyzed the pseudo-dielectric functions by using the multi-layer model. The dielectric functions were fitted by using a Holden model dielectric function. We used anisotropic layer modeling for the ZnO thin film, whereas we adopted the approximation of isotropic layer modeling for the Zn1-xMgxO alloys. We also discuss the Mg composition dependence of the bandgap and the binding energy in Zn1-xMgxO alloys, and consider the valence-band ordering in ZnO thin films.
Keywords
ZnO; dielectric function; ellipsometry; critical point; Holden model; PHOTOREFLECTANCE SPECTRA; OPTICAL-CONSTANTS; ZINC-OXIDE; CRYSTALS; LAYER
URI
http://oasis.postech.ac.kr/handle/2014.oak/18136
ISSN
0374-4884
Article Type
Article
Citation
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, vol. 44, no. 1, page. 129 - 132, 2004-01
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 YI, GYU CHUL
Dept of Materials Science & Enginrg
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