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Deposition and mechanical evaluation of superhard Ti-Al-Si-N nanocomposite films by a hybrid coating system

Title
Deposition and mechanical evaluation of superhard Ti-Al-Si-N nanocomposite films by a hybrid coating system
Authors
Park, IWChoi, SRSuh, JHPark, CGKim, KH
POSTECH Authors
Park, CG
Date Issued
Jan-2004
Publisher
ELSEVIER SCIENCE SA
Keywords
Ti-Al-Si-N; superhard; nanocomposite; hybrid coating system; mechanical evaluation; ION PLATING METHOD; NITRIDE; WEAR; MICROSTRUCTURE; LAYER; PERFORMANCE; BEHAVIOR; SILICON
URI
http://oasis.postech.ac.kr/handle/2014.oak/18081
DOI
10.1016/S0040-6090(0
ISSN
0040-6090
Article Type
Article
Citation
THIN SOLID FILMS, vol. 447, page. 443 - 448, 2004-01
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 PARK, CHAN GYUNG
Dept of Materials Science & Enginrg
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