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Ballistic-mode plasma-based ion implantation for surface-resistivity modification of polyimide film

Title
Ballistic-mode plasma-based ion implantation for surface-resistivity modification of polyimide film
Authors
Park, BKim, JCho, MNamkung, WKim, SJYoo, HY
POSTECH Authors
Cho, M
Date Issued
Jun-2012
Publisher
IEEE
Keywords
Insulator surface modification; ion implantation; pulse modulator; surface resistivity; DISSIPATION; TECHNOLOGY
URI
http://oasis.postech.ac.kr/handle/2014.oak/16442
DOI
10.1109/TPS.2012.219
ISSN
0093-3813
Article Type
Article
Citation
IEEE TRANSACTIONS ON PLASMA SCIENCE, vol. 40, no. 6, page. 1749 - 1752, 2012-06
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 CHO, MOO HYUN
Div. of Advanced Nuclear Enginrg
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