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Optimization of Back-Side Illuminated CMOS Image Sensors

Title
Optimization of Back-Side Illuminated CMOS Image Sensors
Authors
조성욱
Date Issued
2012
Publisher
포항공과대학교
Abstract
We optimized back-side illuminated (BSI) CMOS image sensors (CIS) to improve optical efficiency. We used three-dimensional (3D) finite-difference time-domain (FDTD) simulation to optimize the radius of the curvature of the micro-lens and the thickness of the over-coat layer. We also used the Poynting theorem to calculate the power absorption of the photo-diode, and the transfer matrix to design the optimum structure of anti-reflection coating. Using the theory of frequency selective surface (FSS), we designed IR pass filter and IR cutoff filter possible to integrate into 3D BSI pixels. In this paper, we represented optimization methods of the BSI pixel structure and design methods of metal IR pass filter and IR cutoff filter. These results can be used to enhance optical properties of CISs and reduce the cost of the CIS module.
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001384678
http://oasis.postech.ac.kr/handle/2014.oak/1596
Article Type
Thesis
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