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Cited 11 time in webofscience Cited 11 time in scopus
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Initial Stage Growth during Plasma-Enhanced Atomic Layer Deposition of Cobalt

Title
Initial Stage Growth during Plasma-Enhanced Atomic Layer Deposition of Cobalt
Authors
Lee, HBRPark, YJBaik, SKim, H
Date Issued
Mar-2012
Publisher
WILEY-V C H VERLAG GMBH
Keywords
ALD; Cobalt; Contact; Nucleation; Silicide; XRR; SURFACE-CHEMISTRY; ISLAND GROWTH; FILM GROWTH; THIN-FILMS; MODE; NUCLEATION; AMMONIA; OXIDE; SI
URI
http://oasis.postech.ac.kr/handle/2014.oak/15794
DOI
10.1002/CVDE.201106937
ISSN
0948-1907
Article Type
Article
Citation
CHEMICAL VAPOR DEPOSITION, vol. 18, no. 1~3, page. 41 - 45, 2012-03
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