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Cited 2 time in webofscience Cited 12 time in scopus
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Optimized Multigrid Strategy for Accurate Flare Modeling with Three-Dimensional Mask Effect in Extreme-Ultraviolet Lithography

Title
Optimized Multigrid Strategy for Accurate Flare Modeling with Three-Dimensional Mask Effect in Extreme-Ultraviolet Lithography
Authors
Lee, JLee, SKim, CKim, YKim, SKim, O
POSTECH Authors
Kim, O
Date Issued
Jun-2012
Publisher
JAP
Keywords
COMPENSATION; IMPACT; LIGHT
URI
http://oasis.postech.ac.kr/handle/2014.oak/15658
DOI
10.1143/JJAP.51.06FB06
ISSN
0021-4922
Article Type
Article
Citation
Japaness Journal of Applied Physics, vol. 51, no. 6, page. 6FB06, 2012-06
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 KIM, OHYUN
Dept of Electrical Enginrg
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