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Simultaneous Formation of Ohmic Contacts on p (+)- and n (+)-4H-SiC Using a Ti/Ni Bilayer

Title
Simultaneous Formation of Ohmic Contacts on p (+)- and n (+)-4H-SiC Using a Ti/Ni Bilayer
Authors
Joo, SJBaek, SKim, SCLee, JS
POSTECH Authors
Lee, JS
Date Issued
Oct-2013
Publisher
Springer
Keywords
4H-SiC; ohmic; contact; Ti; Ni; SILICON-CARBIDE; ELECTRICAL CHARACTERIZATION; TITANIUM; NICKEL; THICKNESS; SYSTEM; FILM
URI
http://oasis.postech.ac.kr/handle/2014.oak/15338
DOI
10.1007/S11664-013-2677-X
ISSN
0361-5235
Article Type
Article
Citation
Journal of Electronic Materials, vol. 42, no. 10, page. 2897 - 2904, 2013-10
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 LEE, JEONG SOO
Dept of Electrical Enginrg
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