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Effect of Electron Heating Mode on Charge-Up Damage in Dual-Frequency Capacitive Discharges

Title
Effect of Electron Heating Mode on Charge-Up Damage in Dual-Frequency Capacitive Discharges
Authors
Kwon, HCLee, SHRehman, AULee, JK
Date Issued
Nov-2011
Publisher
IEEE Nuclear and Plasma Sciences Society
Keywords
Plasma control; plasma heating; plasma properties
URI
http://oasis.postech.ac.kr/handle/2014.oak/15060
DOI
10.1109/TPS.2011.2157529
ISSN
0093-3813
Article Type
Article
Citation
IEEE TRANSACTIONS ON PLASMA SCIENCE, vol. 39, no. 11, page. 2530 - 2531, 2011-11
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