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Article
Cited 10 time in webofscience Cited 13 time in scopus
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Role of transverse magnetic field in the capacitive discharge

Title
Role of transverse magnetic field in the capacitive discharge
Authors
You, SJHai, TTPark, MKim, DWKim, JHSeong, DJShin, YHLee, SHPark, GYLee, JKChang, HY
Date Issued
Aug-2011
Publisher
Elsevier
Keywords
Capacitive; Discharge; Magnetic field; Langmuir probe; ELECTRON-ENERGY DISTRIBUTION; HEATING-MODE TRANSITION; RF DISCHARGE; POWER DISSIPATION; COUPLED PLASMA; FREQUENCY; KINETICS; TRANSPORT; SHEATHS; ARGON
URI
http://oasis.postech.ac.kr/handle/2014.oak/15059
DOI
10.1016/J.TSF.2011.01.384
ISSN
0040-6090
Article Type
Article
Citation
THIN SOLID FILMS, vol. 519, no. 20, page. 6981 - 6989, 2011-08
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