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Low-temperature spin-on-glass method involving high-pressure annealing for filling high-aspect-ratio structures

Title
Low-temperature spin-on-glass method involving high-pressure annealing for filling high-aspect-ratio structures
Authors
Lee, DWoo, JPark, SCha, ELee, SHwang, H
POSTECH Authors
Hwang, H
Date Issued
Jun-2014
Publisher
IOP PUBLISHING LTD
URI
http://oasis.postech.ac.kr/handle/2014.oak/13565
DOI
10.7567/JJAP.53.068007
ISSN
0021-4922
Article Type
Article
Citation
JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 53, no. 6, 2014-06
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 HWANG, HYUNSANG
Dept of Materials Science & Enginrg
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