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A microstructural and electrical investigation of Pd/Ge/Ti/Au ohmic contact to n-type GaAs

Title
A microstructural and electrical investigation of Pd/Ge/Ti/Au ohmic contact to n-type GaAs
Authors
Kwak, JSBaik, HKKim, HLee, JLShin, DWPark, CG
POSTECH Authors
Park, CG
Date Issued
Jan-1996
Publisher
MATERIALS RESEARCH SOCIETY
URI
http://oasis.postech.ac.kr/handle/2014.oak/13141
ISSN
0886-7860
Article Type
Article
Citation
ADVANCED METALLIZATION FOR FUTURE ULSI, vol. 427, page. 571 - 576, 1996-01
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 PARK, CHAN GYUNG
Dept of Materials Science & Enginrg
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