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Enhancement of cleaning efficiency by geometrical confinement of plasma expansion in the laser shock cleaning process for nanoscale contaminant removal

Title
Enhancement of cleaning efficiency by geometrical confinement of plasma expansion in the laser shock cleaning process for nanoscale contaminant removal
Authors
Jang, DOh, JHLee, JMKim, D
POSTECH Authors
Kim, D
Date Issued
Jan-2009
Publisher
SPIE-INT SOC OPTICAL ENGINEERING
URI
http://oasis.postech.ac.kr/handle/2014.oak/12718
DOI
10.1117/12.813629
ISSN
0277-786X
Article Type
Article
Citation
Proceedings of SPIE-The International Society for Optical Engineering, 7201
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 KIM, DONG SIK
Dept of Mechanical Enginrg
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