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마이크로 챔버 내에서의 압전 캔틸레버 센서의 측정 신뢰성 확보 기술

Title
마이크로 챔버 내에서의 압전 캔틸레버 센서의 측정 신뢰성 확보 기술
Authors
조종윤
Date Issued
2011
Publisher
포항공과대학교
Abstract
In this master thesis, a micro-chamber system is studied and developed to enhance of measurement reliability using PEMC(PiezoElectric Micro-Cantilever) sensor in order to use in a portable diagnosis system or Lab-On-a-Chip(LOC) for detecting biomaterials such as protein or DNA. The PEMS sensor has been developed for mass sensor by our group. The sensor detects a tiny amount of mass the change in the resonance frequency of a micro-cantilever with a piezoelectric film based on the mass-micro-balancing technique. In order to measure accurate a tiny amount of mass, the environmental effects such as air condition, humidity and temperature are considered. The method to determine the PEMC sensor is actuated in micro-chamber to minimize the environmental effects and use array PEMC sensor for multi-plexed detection. The shape, size and PEMC position in chamber are consided in micro-chamber design because its acoustic-structure interaction effect is very high due to the large acoustic radiation impedance in micro-chamber. A numerical approach to investigate the size and shape effect on the resonance frequency and sensitivity associated with the first mode of micro-cantilever vibration in micro-chamber. The numerical simulation results using COMSOL are verified by experiments and compared with the approximate analytical solutions. And an array PEMC sensor is tested by detecting HBsAg in micro-chamber using “flow and dry technique”. The results of the HBsAg detection experiments show that the performance of the sensor is analyzed in micro-chamber.
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001097828
http://oasis.postech.ac.kr/handle/2014.oak/1267
Article Type
Thesis
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