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Effect of the cyclic delivery of (hexafluoroacetylacetonate)Cu-(I) X(3,3-dimethyl-1-butene) pulse and Ar purge gas on the low temperature copper metalorganic chemical vapor deposition

Title
Effect of the cyclic delivery of (hexafluoroacetylacetonate)Cu-(I) X(3,3-dimethyl-1-butene) pulse and Ar purge gas on the low temperature copper metalorganic chemical vapor deposition
Authors
Kim, KTak, YYong, KJ
POSTECH Authors
Yong, KJ
Date Issued
Feb-2004
Publisher
A V S AMER INST PHYSICS
URI
http://oasis.postech.ac.kr/handle/2014.oak/11272
DOI
10.1116/1.1651109
ISSN
1071-1023
Article Type
Article
Citation
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, vol. 22, no. 2, page. 528 - 532, 2004-02
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용기중YONG, KIJUNG
Dept. of Chemical Enginrg
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