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Effect of the cyclic delivery of (hexafluoroacetylacetonate)Cu-(I) X(3,3-dimethyl-1-butene) pulse and Ar purge gas on the low temperature copper metalorganic chemical vapor deposition
- Title
- Effect of the cyclic delivery of (hexafluoroacetylacetonate)Cu-(I) X(3,3-dimethyl-1-butene) pulse and Ar purge gas on the low temperature copper metalorganic chemical vapor deposition
- POSTECH Authors
- Yong, KJ
- Date Issued
- Feb-2004
- Publisher
- A V S AMER INST PHYSICS
- ISSN
- 1071-1023
- Article Type
- Article
- Citation
- JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, vol. 22, no. 2, page. 528 - 532, 2004-02
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Related Researcher
- 용기중YONG, KIJUNG
- Dept. of Chemical Enginrg