Article
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Adsorption and reactions of tetrabutoxysilane (TBOS) on Si(100)
- Title
- Adsorption and reactions of tetrabutoxysilane (TBOS) on Si(100)
- POSTECH Authors
- Yong, KJ
- Date Issued
- Jun-2005
- Publisher
- A V S AMER INST PHYSICS
- ISSN
- 0734-2101
- Article Type
- Article
- Citation
- JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, vol. 23, no. 4, page. 613 - 616, 2005-06
- Files in This Item:
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
Communities & Collection
Related Researcher
- 용기중YONG, KIJUNG
- Dept. of Chemical Enginrg