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Method for measuring deep levels in thin silicon-on-insulator layer without any interface effects

Title
Method for measuring deep levels in thin silicon-on-insulator layer without any interface effects
Authors
Kang, HSAhn, CGKang, BKKwon, YK
POSTECH Authors
Kang, BK
Date Issued
Jan-1998
Publisher
ELECTROCHEMICAL SOC INC
URI
http://oasis.postech.ac.kr/handle/2014.oak/11087
ISSN
0013-4651
Article Type
Article
Citation
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 145, no. 10, page. 3581 - 3585, 1998-01
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 KANG, BONG KOO
Dept of Electrical Enginrg
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