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Cited 60 time in webofscience Cited 62 time in scopus
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High-quality cobalt thin films by plasma-enhanced atomic layer deposition

Title
High-quality cobalt thin films by plasma-enhanced atomic layer deposition
Authors
Lee, HBRKim, H
POSTECH Authors
Kim, H
Date Issued
Jan-2006
Publisher
ELECTROCHEMICAL SOC INC
URI
http://oasis.postech.ac.kr/handle/2014.oak/10113
DOI
10.1149/1.2338777
ISSN
1099-0062
Article Type
Article
Citation
ELECTROCHEMICAL AND SOLID STATE LETTERS, no. 11, 2006-01
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 KIM, HYUNGJUN
Dept of Materials Science & Enginrg
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